silicon micromachining

There are a number of basic techniques that can be used to pattern thin films that have been deposited on a silicon wafer, and to shape the wafer itself, to form a set of basic microstructures (bulk silicon micromachining). Electrochemical etching techniques are being investigated to extend the set of basic silicon micromachining techniques. Silicon bonding techniques can also be utilised to extend the structures produced by silicon micromachining techniques into multilayer structures.

Blu-Si

Using IC technology and equipment, Blu-Si is able to miniaturize discrete components onto a wafer- scale process fully customizable to individual requirements.

  1. Design- using our client's specifications, we create the photo-tools in fabricating the device and/or component.
  2. Engineering- our expertise includes developing the process for the fabrication of the device.
  3. Microfabrication- our facility if fully equipped to handle all processing steps starting with photolithography, micromachining (surface and bulk), thin film deposition and packaging. Click here for a full capabilities list (link to capabilities list).
Credit: D Banks

You'll find more information about silicon micromachining