silicon micromachiningThere are a number of basic techniques that can be used to pattern thin films that have been deposited on a silicon wafer, and to shape the wafer itself, to form a set of basic microstructures (bulk silicon micromachining). Electrochemical etching techniques are being investigated to extend the set of basic silicon micromachining techniques. Silicon bonding techniques can also be utilised to extend the structures produced by silicon micromachining techniques into multilayer structures.Blu-SiUsing IC technology and equipment, Blu-Si is able to miniaturize discrete components onto a wafer- scale process fully customizable to individual requirements.
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