microfabricationMicro-Electro-Mechanical Systems (MEMS) is the integration of mechanical elements, sensors, actuators, and electronics on a common silicon substrate through the utilization of microfabrication technology. While the electronics are fabricated using integrated circuit (IC) process sequences (e.g., CMOS, Bipolar, or BICMOS processes), the micromechanical components are fabricated using compatible micromachining processes that selectively etch away parts of the silicon wafer or add new structural layers to form the mechanical and electromechanical devices.Blu-SiBlu-Si, Inc. is a silicon micromachining, microfabrication company that provides custom product development and process development for the microtechnology market. We are a full service company with many years of experience of finding solutions for our customers.
Our facility is fully equipped to handle all processing steps involved with microfabrication starting with photolithography, micromachining (surface and bulk), thin film deposition and packaging. Significant cost reductions can be realized through our wafer-scale processing.
Credit: The MEMS Exchange
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